Dhivanraj Subramanian, Mechanical Engineer II

Dhivanraj Subramanian

Mechanical Engineer II

Applied materials

Location
India - Bengaluru
Education
Bachelor's degree, Mechanical Engineering
Experience
10 years, 7 Months

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Work Experience

Total years of experience :10 years, 7 Months

Mechanical Engineer II at Applied materials
  • India - Bengaluru
  • My current job since August 2020

• Primary responsibilities include development of ALD/CVD/ETCH-Preclean fabrication equipment. This encompasses critical components such as Lid, Showerhead, Gas delivery, Injection module, etc.
• Support Sustainability of existing products, to resolve customer production tool issues.
• Implemented thermal, gas-delivery and RF subsystems to improve film properties for multiple complex nodes. This involved thorough assessments from the conceptual stage through to onsite production.
• Developed sub-zero thermal and ultra-high vacuum systems to optimize the film mechanical properties. Collaborated closely with cross-functional teams to procure cryogenic components, deploy control systems, and generated test plans to understand system behaviour and improved film properties.
• Researched various ceramics microstructure with rigorous lab tests, DOE analysis and implemented a robust material solution for in-situ plasma clean to reduce defects and increase system throughput. Executed this solution at major customer fabs across worldwide, effectively resolving production line-down issues within the committed time frame.
• Actively involved in Multiphysics (Thermal, Flow, etc.) simulation tasks to characterize the design criteria.
• Performed root cause analysis, thermal simulations, documented faults in tracking system.
• Promptly presented project deliverables to the peers, CCB and executive management with detailed understandings on problem objectives, issues, and solutions with thorough research work, and product road maps.
• Provided technical support to customers and account teams regarding non-conformance issues (such as part quality, repeatability, and process reliability) and delivered root cause analysis reports to address field issues promptly.
• Performed ECO releases of critical components following design rules, quality control in production drawings, and creating test plans for prototype builds, DFMEA reviews.
• Estimated costs or submitted bids for engineering, construction, or extraction projects.
• Involved in project planning to coordinate mechanical system designs with structural and architecture teams, mitigate design conflicts, and coordinate delivery timelines.

Projects Annexure:
 Wafer edge drop/non-uniformity: Redesign components such as interface plate, Pumping liner, Showerhead. Worked closed with suppliers for Pedestal heaters.
 Peltier cooler design: Implemented new design of cooling adapter plate in the Peltier cooler.
 Thermal shield: New shield created for the pedestal heater to improve the non-uniformity of pedestal temperature.
 ALD +Lid module development: Developed new components (Showerhead, pumping liner, cap insert and cap housing) of ALD lid module based on requirements of process and reference system.
 Copper contamination: Reviewed and prepared the overlay image of Cu particle on wafer to identify the source. Analysed all the wetted part (Gas flow path) - material chemical composition, dissolving of Cu on metals at condition such as Toxic gas/Temperature/Pressure.
 Sustaining activities: Interacting with suppliers directly for the manufacturing process, supplier problem sheet (SPS) and updating the drawing notes to improve the quality.
 Pedestal heater O-ring leak: Verified the existing design - Performed O-ring calculation (using both spreadsheet calculator and supplier calculator) and tolerance stack up analysis.
 Edge ring vibration: Performed the tolerance stack up and basic calculation to identify the root cause. CIP of edge ring and tested in tool to resolve the vibration issue.

Senior Mechanical Engineer at Triad Software Pvt ltd
  • India - Chennai
  • December 2017 to July 2020

• Held primary engineering responsibilities as a Mechanical Engineer, which included designing and qualifying subsystems of Lithographic equipment and supporting existing product sustainability.
• Developed concepts for the piping systems, mounting of turbo pumps in Vacuum chamber in Reticle Handler.
• Directing BOM related activities such as preparation of Process & Production BOM for production declaration
• Involved in CCB meeting: discussed about the release /changes in the modules and proceed further ECN activities.
• Performed Outgassing calculations for the Sub modules.
• Prepared Stack-up analysis for the NPD parts/sub-assemblies
• Selecting the vendor components (Mechanical, Gas or Fluid distribution) based on applications, market availability and costs. Developed pneumatic interconnect diagram for subassemblies of panel printer using AutoCAD.
• Formulating technical requirements and specifying/recommending design modifications based on requirements, keeping a check on product quality & impact of design modifications on product features.
• Writing technical documentation for describing the specifications/usage of products.
• Coordinating with various teams for design feasibility; drafting and detailing the designs for machines.
• Directing BOM related activities such as preparation of Process & Production BOM for production declaration.
• Involved in developing the concepts for enclosure with connectors for Optical fibers used in EUV applications.
• Planning, organizing, directing, & controlling product development through business excellence philosophy.

Projects Annexure:
 NPD Product - EXE 5000 RH
 Tooling - ORION 400 HW
 Product and Tooling - Gen 4.5 Display Panel Printer (Onto)

Design Engineer at Danieli India Ltd
  • India - Chennai
  • October 2013 to October 2017

• Design and Develop 3D Part Models & assemblies as per Layout by using Auto-desk Inventor, creating BOM, Pipe routings of hydraulic/Pneumatic, electrical connections, create equipment layout for Steel Rolling mill Equipment.
• Orchestrating Concept Making activities for Special Purpose Machines (SPM) for customers.
• Coordinating with various teams for the DAP making process; drafting and detailing the designs for machines.
• Directing BOM related activities such as preparation of Process & Production BOM for production declaration.
• Developing product along with concept development, concept finalization, specification finalization, design engineering, component development, implementation & after launch problem resolution.

• Involved in Design & Development of components for Rolling mill equipment for different process line such as Hot Dip Galvanizing line, Push pull pickling line, Cold Reverse mill line (CRM), Skin Pass mill with Tension leveler as per steel plant capacity.
• Design & create the detail drawing for equipment such as Belt conveyor, Shear cutting & welding, etc.,
• Design pipe supports drawings & Piping material take off and BOQ.
• Involved in reviewing Equipment vendor drawing for proposed design.
• Preparing overall plot plan, Equipment layout, piping layout in PDMS.
• Create 3D model of hydraulic, Pneumatic & Oil lubrication system for winding and rewinding assembly with gear box.
• Responsible for documentation of Final Test Report (FTR), Quality Control Plan (QCP), Job Document list (JDL), Design Verification Report (DVR).

Projects Annexure:
 Double Reduction Cold Rolling and Electrolytic Tinning Line - JSW, India
 Push Pull & Pickling Line - ABHUL KHAIR STEEL - Bangladesh
 Cold Reverse Mill - UNITED IRON & STEEL COMPANY - Emirates

Education

Bachelor's degree, Mechanical Engineering
  • at Anna University
  • June 2013

Mechanical Engineering with 8.25 CGPA

Specialties & Skills

Simulation Design
Semiconductor Equipment
Cost Reduction
Project Management
Leadership
New Product Development
Structural Mechanics
Simulation
Semiconductor manufacturing (ALD, ETCH)
Material science
Electro-Mechanical System design

Languages

English
Expert

Training and Certifications

Ansys (Training)
Training Institute:
Applied Materials
Date Attended:
December 2020
Duration:
24 hours

Hobbies

  • Soccer